Deposition and characterization of Ca3Ce(PO4)3 phase in coating to protect stainless steel 316L

RF sputtering was achieved to get Ca3Ce(PO4)3 phase from target of 60wt%CeO2/TCP on stainless steel 316L surface for bioapplication. The selection ceria and tricalcium phosphate is according fact the importance these materials in biomedical media. produced confirmed by XRD analysis (JCPDS card No. 09-0169) with important 2θ values at (≈ 28.4, 33.7, 46.6 44.7). FESEM/EDS exam showed smoother indication appear this through compact layer deposited particles. EDS mapping presence main elements substrate addition Ce, Ca, P, O. AFM images shows uniform distribution particles indicates lower average roughness diameter coated specimen compared substrate.